(Invited) Thin Film Technologies for Micro/Nano Systems; A Review

Abstract

The role of thin films in the manufacturing of physical and chemical sensors, actuators, microelectronics and large area electronics is reviewed. Either structural or sacrificial; thin films plays a key role in defining the critical dimensions in a micro system. For structural films, the device performance is to a greater extend determined by the film properties. New film properties enables new devices. The drive to further miniaturize micro/nano systems will further broaden the applications and push the technology of thin films.