Interconnects and Interposer in Porous Anodic Aluminum Oxide: The Fabrication Technology and Process Integration

Author:

Chan Hsiang-YuORCID,Bachman Mark,Li Guann-Pyng

Publisher

The Electrochemical Society

Subject

Electronic, Optical and Magnetic Materials

Reference27 articles.

1. Arden W. Brillouë M. Cogez P. Graef M. Huizing B. Mahnkopf R. , “More than Moore,” White Paper. Available: http://www.itrs.net/Links/2010ITRS/IRC-ITRS-MtM-v2%203.pdf.

2. 300mm size ultra-thin glass interposer technology and high-Q embedded helical inductor (EHI) for mobile application

3. High-frequency characterization of through package vias formed by focused electrical-discharge in thin glass interposers

4. Development of Through Glass Via (TGV) formation technology using electrical discharging for 2.5/3D integrated packaging

5. Microelectronics Packaging – As Features Get Smaller, The Role for Lasers Gets Larger;Müller;Commerc. Micro Manuf. Int.,2015

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