An Attempt at the AES Evaluation of the Composition of Off‐Stoichiometric Silicon Nitride

Author:

Thomas Simon12,Mattox Robert J.12

Affiliation:

1. Burroughs Corporation, San Diego, California 92127

2. Motorola Semiconductor Group, Phoenix, Arizona 85008

Publisher

The Electrochemical Society

Subject

Materials Chemistry,Electrochemistry,Surfaces, Coatings and Films,Condensed Matter Physics,Renewable Energy, Sustainability and the Environment,Electronic, Optical and Magnetic Materials

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4. Studying the mechanism of the interaction between silicon nitride, oxygen, and nitrogen in heating and the processes of defect formation in Si3N4 — gas systems;Refractories and Industrial Ceramics;1998-09

5. Theoretical analysis of defect formation processes in silicon nitride;Refractories and Industrial Ceramics;1998-05

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