An Attempt at the AES Evaluation of the Composition of Off‐Stoichiometric Silicon Nitride-Reference-Cited by-同舟云学术

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An Attempt at the AES Evaluation of the Composition of Off‐Stoichiometric Silicon Nitride

Published:1977-12-01 Issue:12 Volume:124 Page:1942-1945
ISSN:0013-4651
Container-title:Journal of The Electrochemical Society
language:
Short-container-title:J. Electrochem. Soc.

Author:

Thomas Simon¹²,Mattox Robert J.¹²

Affiliation:

1. Burroughs Corporation, San Diego, California 92127

2. Motorola Semiconductor Group, Phoenix, Arizona 85008

Publisher

The Electrochemical Society

Subject

Materials Chemistry,Electrochemistry,Surfaces, Coatings and Films,Condensed Matter Physics,Renewable Energy, Sustainability and the Environment,Electronic, Optical and Magnetic Materials

Link

https://iopscience.iop.org/article/10.1149/1.2133201/pdf

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