Author:
Le Q. T.,Jeannot V.,Baklanov M. R.,Vanderheyden R.,Boullart W.,Vanhaelemeersch S.
Publisher
The Electrochemical Society
Subject
Electrical and Electronic Engineering,Electrochemistry,Physical and Theoretical Chemistry,General Materials Science,General Chemical Engineering
Reference11 articles.
1. Post-Plasma-Etch Residue Removal Using CO[sub 2]-Based Fluids
2. Post Plasma Etch Residue Removal Using CO[sub 2]-TMAHCO[sub 3] Mixtures: Comparison of Single-Phase and Two-Phase Mixtures
3. Design of Nonionic Surfactants for Supercritical Carbon Dioxide
4. Water-in-Carbon Dioxide Microemulsions: An Environment for Hydrophiles Including Proteins
5. M. R. Baklanov, Q. T. Le, E. Kesters, F. Iacopi, J. Van Aelst, H. Struyf, W. Boullart, S. Vanhaelemeersch, and K. Maex , IITC 2004 presentation, paper presented at International Information Technology Conference 2004.
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