Author:
Tapily K.,Jakes J. E.,Stone D. S.,Shrestha P.,Gu D.,Baumgart H.,Elmustafa A. A.
Publisher
The Electrochemical Society
Subject
Materials Chemistry,Electrochemistry,Surfaces, Coatings and Films,Condensed Matter Physics,Renewable Energy, Sustainability and the Environment,Electronic, Optical and Magnetic Materials
Reference20 articles.
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3. Pulsed liquid-injection MOCVD of high-K oxides for advanced semiconductor technologies
4. Recent developments in the MOCVD and ALD of rare earth oxides and silicates
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