On the Formation of 50 nm Diameter Free-Standing Silicon Wires Produced by Ion Irradiation
Author:
Publisher
The Electrochemical Society
Subject
Electronic, Optical and Magnetic Materials
Reference22 articles.
1. Micromachining of silicon with a proton microbeam
2. Controlled intensity emission from patterned porous silicon using focused proton beam irradiation
3. Hole transport through proton-irradiatedp-type silicon wafers during electrochemical anodization
4. Si micro-turbine by proton beam writing and porous silicon micromachining
5. Fabrication of microstructures in III–V semiconductors by proton beam writing
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3. Fabrication of 3D photonic components on bulk crystalline silicon;Optics Express;2015-01-05
4. Depth-Resolved Imaging of Radiation-Induced Doping Changes in Silicon;ECS Journal of Solid State Science and Technology;2015
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