Ion Beam Based Patterning of Porous Silicon
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Publisher
Springer International Publishing
Link
http://link.springer.com/content/pdf/10.1007/978-3-319-71381-6_109
Reference44 articles.
1. Arrand HF, Benson TM, Sewell P et al (1999) Optical waveguides in porous silicon pre-patterned by localized nitrogen implantation. J Lumin 80:199–202
2. Azimi S, Breese MBH, Dang ZY et al (2012a) Fabrication of complex curved three-dimensional silicon microstructures using ion irradiation. J Micromech Microeng 22:015015
3. Azimi S, Song J, Dang ZY et al (2012b) Three-dimensional silicon micromachining. J Micromech Microeng 22:113001
4. Azimi S, Dang ZY, Zhang C et al (2014a) Buried centimeter-long micro- and nanochannel arrays in porous silicon and glass. Lab Chip 14:2081–2089
5. Azimi S, Song J, Li CJ et al (2014b) Nanoscale lithography of LaAlO3/SrTiO3 wires using silicon stencil masks. Nanotechnology 25:445301
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