Micromachining of silicon with a proton microbeam-Reference-Cited by-同舟云学术

Micromachining of silicon with a proton microbeam

Published:1999-09 Issue:1-4 Volume:158 Page:173-178
ISSN:0168-583X
Container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
language:en
Short-container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Author:

Polesello P,Manfredotti C,Fizzotti F,Lu R,Vittone E,Lerondel G,Rossi A.M,Amato G,Boarino L,Galassini S,Jaksic M,Pastuovic Z

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference5 articles.

1. Deep X-ray lithography for the production of three-dimensional microstructures from metals, polymers and ceramics

2. Micromachining using deep ion beam lithography

3. W. Lang, in: G. Amato, C. Delerue, H.J. Bardeleben (Eds.), Optical and Structural Properties of Porous Silicon Nanostructures, Gordon and Breach, Newark, 1997, pp. 597–620

4. New Applications of Porous Silicon

5. J.F. Ziegler, J.P. Biersack, U. Littmark, The Stopping and Range of Ions in Solids, Pergamon Press, New York, 1985

Cited by 35 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Ion Beam Based Patterning of Porous Silicon;Handbook of Porous Silicon;2018

2. Study of the formation mechanism of hierarchical silicon structures produced by sequential ion beam irradiation and anodic etching;Vacuum;2017-04

3. Ion Beam Based Patterning of Porous Silicon;Handbook of Porous Silicon;2016

4. Materials modification using ions with energies below 1MeV/u;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2013-12

5. On the formation of silicon wires produced by high-energy ion irradiation;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2013-02