Communication—Direct Imaging of Irradiation Damage in Semiconductors by Low-Energy SEM
Author:
Publisher
The Electrochemical Society
Subject
Electronic, Optical and Magnetic Materials
Reference15 articles.
1. Ion implantation for isolation of III-V semiconductors
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1. Depth-distribution of resistivity within ion-irradiated semiconductor layers revealed by low-kV scanning electron microscopy;Materials Science in Semiconductor Processing;2023-10
2. Direct visualization of highly resistive areas in GaN by means of low-voltage scanning electron microscopy;Materials Science in Semiconductor Processing;2022-02
3. Resistivity contrast imaging in semiconductor structures using ultra-low energy scanning electron microscopy;Ultramicroscopy;2021-09
4. Damage-induced voltage alteration (DIVA) contrast in SEM images of ion-irradiated semiconductors;Ultramicroscopy;2019-09
5. Ion-Irradiated Damage in Semiconductors Visualized by Means of Low-kV Scanning Electron Microscopy;Microscopy and Microanalysis;2019-08
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