Author:
Miller K. J.,Grieco M. J.,Sze S. M.
Publisher
The Electrochemical Society
Subject
Materials Chemistry,Electrochemistry,Surfaces, Coatings and Films,Condensed Matter Physics,Renewable Energy, Sustainability and the Environment,Electronic, Optical and Magnetic Materials
Cited by
15 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Metals – Gas-Phase Deposition and Applications;Comprehensive Inorganic Chemistry II;2013
2. MEMS Wet-Etch Processes and Procedures;MEMS Reference Shelf;2011
3. Chemical vapor deposition of metals: Part 1. An overview of CVD processes;Chemical Vapor Deposition;1995-07
4. Vapour deposited coatings;Smithells Metals Reference Book;1992
5. References;Thin Films by Chemical Vapour Deposition;1990