Chemical vapor deposition of metals: Part 1. An overview of CVD processes-Reference-Cited by-同舟云学术

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Chemical vapor deposition of metals: Part 1. An overview of CVD processes

Published:1995-07 Issue:1 Volume:1 Page:8-23
ISSN:0948-1907
Container-title:Chemical Vapor Deposition
language:en
Short-container-title:Chem. Vap. Deposition

Author:

Hampden-Smith Mark J.,Kodas Toivo T.

Publisher

Wiley

Subject

Process Chemistry and Technology,Surfaces and Interfaces,General Chemistry

Reference306 articles.

1. in Microelectronics Processing (Eds: ), American Chemical Society, Washington, DC 1989.

2. in The Chemistry of Metal CVD (Eds: ), VCH, Weinheim 1994. Ch. 1.

3. Sol-Gel Science: The Physics and Chemistry of Sol-Gel Processing, Academic Press. Boston 1990.

4. Catalytic palladium-based membrane reactors: A review

5. Glow‐discharge enhanced permeation of oxygen through silver

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