Simulation Research on High-Voltage β-Ga2O3 MOSFET Based on Floating Field Plate

Abstract

The simulation model of a depletion-mode (D-mode) β-Ga2O3 metal–oxide–semiconductor field-effect transistor (MOSFET) is constructed by Silvaco ATLAS technology computer-aided design (TCAD) simulation, which employs an epitaxial drift layer grown on a sapphire substrate. On this basis, the floating field plate (F-FP) structure based on the gate-pad-connected field plate (P-FP) is proposed to improve the breakdown characteristics of the device, which is easy to be prepared. The working principle of F-FP is investigated with the help of the device with one F-FP. Based on the principle that the number of floating field plates is increased on an optimized floating field plate structure. Subsequently, the devices with two and three floating field plates are simulated in turn, and the optimal structural parameters of the three F-FPs device are finally obtained, and the breakdown voltage is 3800 V at this time. In addition, it is found that the device breakdown voltage is increased by approximately 500–600 V for each additional floating field plate.