Author:
Cheng Xuan,Gu Chi,Feng Zu-De
Publisher
The Electrochemical Society
Subject
Materials Chemistry,Electrochemistry,Surfaces, Coatings and Films,Condensed Matter Physics,Renewable Energy, Sustainability and the Environment,Electronic, Optical and Magnetic Materials
Reference12 articles.
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3. Deposition of Copper from a Buffered Oxide Etchant onto Silicon Wafers
4. Electrochemical Investigation of Copper Contamination on Silicon Wafers from HF Solutions
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