Characterization of Particle Size and Surface Adsorption for SiO2Abrasives Used in Chemical Mechanical Planarization via Fluorescence Correlation Spectroscopy-Reference-Cited by-同舟云学术

Characterization of Particle Size and Surface Adsorption for SiO2Abrasives Used in Chemical Mechanical Planarization via Fluorescence Correlation Spectroscopy

Published:2015 Issue:11 Volume:4 Page:P5053-P5057
ISSN:2162-8769
Container-title:ECS Journal of Solid State Science and Technology
language:en
Short-container-title:ECS J. Solid State Sci. Technol.

Author:

Jacobson Lauren M.,Turner Daniel K.,Wayman Ashley E.,Carver Colin T.,Rawat Ashwani K.,Moinpour Mansour,Remsen Edward E.

Publisher

The Electrochemical Society

Subject

Electronic, Optical and Magnetic Materials

Reference35 articles.

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2. Accurate sizing of ceria oxide nanoparticles in slurries by the analysis of the optical forward-scattered field

3. Distortion of Single-Particle Optical Sensing (SPOS) Particle Count by Sub-Countable Particles

4. Measurement of CMP Slurry Abrasive Size Distribution by Scanning Mobility Particle Sizer

5. A Study of the Colloidal Stability of Mixed Abrasive Slurries and Their Role in CMP

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