Author:
Tanbara Kenji,Kamigaki Yoshiaki
Publisher
The Electrochemical Society
Subject
Materials Chemistry,Electrochemistry,Surfaces, Coatings and Films,Condensed Matter Physics,Renewable Energy, Sustainability and the Environment,Electronic, Optical and Magnetic Materials
Reference22 articles.
1. Low dielectric constant materials for microelectronics
2. Thermal furnace and Ultraviolet assisted curing impact on SiOCH spin-on ultra low dielectric constant materials
3. S. Nakao, J. Ushio, T. Ohno, T. Hamada, Y. Kamigaki, M. Kato, K. Yoneda, S. Kondo, and N. Kobayashi , inProceedings of the IITC, IEEE, pp. 66–68 (2006).
4. Mechanical Enhancement of Low-k Organosilicates by Laser Spike Annealing
5. Comparison Between E-beam and Ultraviolet Curing to Perform Porous a-SiOC:H
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