Photoresist Removal-Cleaning Technology Using Cryogenic Micro-Solid Nitrogen Spray
Author:
Publisher
The Electrochemical Society
Subject
Electronic, Optical and Magnetic Materials
Reference23 articles.
1. Integrated computational study of ultra-high heat flux cooling using cryogenic micro-solid nitrogen spray
2. Integrated Experimental and Numerical Study of Thermomechanical Resist Removal-Cleaning Performance Using Cryogenic Micro-Solid Nitrogen Spray
3. Thermomechanical Resist Removal-Cleaning System Using Cryogenic Micro-Slush Jet
4. Nanoscale Particle Removal Using Wet Laser Shockwave Cleaning
5. Damage-Free Cryogenic Aerosol Clean Processes
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