Numerical investigation of multiple-bubble behaviour and induced pressure in a megasonic field

Abstract

Clarifying the mechanism of particle removal by megasonic cleaning and multiple-bubble dynamics in megasonic fields is essential for removing contaminant particles during nanodevice cleaning without pattern damage. In particular, the effect of the interaction of multiple bubbles on bubble-collapse behaviour and impulsive pressure induced by bubble collapse should also be discussed. In this study, a compressible locally homogeneous model of a gas–liquid two-phase medium is used to numerically analyse the multiple-bubble behaviour in a megasonic field. The numerical results indicate that, for bubbles with the same equilibrium radius, the natural frequency of the bubble decreases, and bubbles with smaller equilibrium radii resonate with the megasonic wave as the number of bubbles increases. Therefore, the equilibrium radius of bubbles showing maximum wall pressure decreases with an increasing number of bubbles. The increase in bubble number also results in chain collapse, inducing high wall pressure. The effect of the configuration of bubbles is discussed, and the bubble–bubble interaction in the concentric distribution makes a greater contribution to the decrease in the natural frequency of bubbles than the interaction in the straight distribution.