Affiliation:
1. Hughes Research Laboratories, Malibu, California 90265
Publisher
The Electrochemical Society
Subject
Materials Chemistry,Electrochemistry,Surfaces, Coatings and Films,Condensed Matter Physics,Renewable Energy, Sustainability and the Environment,Electronic, Optical and Magnetic Materials
Cited by
22 articles.
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1. Modification of AmBv Semiconductor Layers by Ion Implantation;MRS Proceedings;1993
2. Ion implantation in III–V compounds;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1992-05
3. Ion Implantation in Iii–V Semiconductors;Materials Processing: Theory and Practices;1989
4. Arsenic Ambient Conditions Preventing Surface Degradation of GaAs during Capless Annealing at High Temperatures;Journal of The Electrochemical Society;1987-05-01
5. Rapid annealing of ion-implanted GaAs;physica status solidi (a);1986-04-16