Ion implantation in III–V compounds-Reference-Cited by-同舟云学术

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Ion implantation in III–V compounds

Published:1992-05 Issue:1-4 Volume:68 Page:342-354
ISSN:0168-583X
Container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
language:en
Short-container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Author:

Wesch W.

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference78 articles.

1. Ion implantation for isolation of III-V semiconductors

2. Mass and dose dependence of ion‐implantation‐induced intermixing of GaAs/GaAlAs quantum‐well structures

3. Rapid annealing of ion-implanted GaAs

4. Ion implantation in GaAs

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