Prediction of Ion Energy and Angular Distributions in Single and Dual Frequency Plasmas-Reference-Cited by-同舟云学术

Prediction of Ion Energy and Angular Distributions in Single and Dual Frequency Plasmas

Published:1994-05-01 Issue:5 Volume:141 Page:1313-1320
ISSN:0013-4651
Container-title:Journal of The Electrochemical Society
language:
Short-container-title:J. Electrochem. Soc.

Author:

Myers Frank R.¹²³,Ramaswami Manjula¹²³,Cale Timothy S.¹²³

Affiliation:

1. Microcontroller Technologies Group, Motorola, Incorporated, Chandler, Arizona 85224

2. Advanced Custom Technologies, Motorola, Incorporated, Mesa, Arizona 85201

3. Department of Chemical, Bio & Materials Engineering and Center for Solid State Electronics Research, Arizona State University, Tempe, Arizona 85287

Publisher

The Electrochemical Society

Subject

Materials Chemistry,Electrochemistry,Surfaces, Coatings and Films,Condensed Matter Physics,Renewable Energy, Sustainability and the Environment,Electronic, Optical and Magnetic Materials

Link

https://iopscience.iop.org/article/10.1149/1.2054916/pdf

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