Affiliation:
1. AT&T Bell Laboratories, Murray Hill, New Jersey 07974
Publisher
The Electrochemical Society
Subject
Materials Chemistry,Electrochemistry,Surfaces, Coatings and Films,Condensed Matter Physics,Renewable Energy, Sustainability and the Environment,Electronic, Optical and Magnetic Materials
Cited by
25 articles.
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2. Characterization;Handbook of Semiconductor Interconnection Technology, Second Edition;2006-02-22
3. TEOS/O2 GAS PRESSURE AS A CHEMICAL COMPOSITION ADJUSTER OF PLASMA DEPOSITED SIO2 THIN FILMS;High Temperature Material Processes (An International Quarterly of High-Technology Plasma Processes);2005
4. Film technology;Technology of Integrated Circuits;2000
5. Chemical vapor deposition of coatings on glass;Journal of Non-Crystalline Solids;1997-09