1. In Situ Measurement of Stresses in Thin Films
2. Measuring the Phosphorus Concentration in Deposited Phosphosilicate Films
3. An Evaluation of the Prism Coupler for Measuring the Thickness and Refractive Index of Dielectric Films on Silicon Substrates
4. Ahn, J., K.L. Mittal, and R.H. MacQueen, in Adhesion Measurement of Thin Films, Thick Films and Bulk Coatings, ASTM Special Technical Publication 640, Mittal, K.L., Ed. ASTM, Philadelphia, 1976, p.134.
5. Microfabrication of cantilever styli for the atomic force microscope