Chemical vapor deposition of coatings on glass
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Condensed Matter Physics,Ceramics and Composites,Electronic, Optical and Magnetic Materials
Reference66 articles.
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3. Semi-Insulating Polycrystalline-Silicon (SIPOS) Films Applied to MOS Integrated Circuits
4. Kinetic Modeling of the Chemical Vapor Deposition of Silicon Dioxide from Silane or Disilane and Nitrous Oxide
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