Author:
Kang Tsung-Kuei,Chou Wei-Yang
Publisher
The Electrochemical Society
Subject
Materials Chemistry,Electrochemistry,Surfaces, Coatings and Films,Condensed Matter Physics,Renewable Energy, Sustainability and the Environment,Electronic, Optical and Magnetic Materials
Reference16 articles.
1. A Fully Integrated Aluminum Dual Damascene Process Using a New Double Stopper Structure
2. Q. T. Jiang, M. H. Tsai, A. Frank, V. Parihar, M. Nowell, R. A. Augur, R. H. Havemann, and J. D. Luttmer, inProceedings 6th International Conference on Solid-State and Integrated-Circuit Technology, Vol. 1, 400 (2001).
3. G. B. Ang, Y. N. Hua, S. K. Loh, A. Yogaspari, and S. Redkar, inProceedings of the 8th International Symposium on Physical and Failure Analysis of Integrated Circuits, 107 (2001).
4. K. Musaka, B. Zheng, H. Wang, K. Wijkekoon, L. Chen, J. Lin, K. Watanabe, K. Ohira, T. Hosod, K. Miyata, T. Hasegawa, G. Dixit, R. Chueng, M. Yamada, and S. Kadomura, inProceedings of the IEEE 2001 International Interconnect Technology Conference, 83 (2001).
5. Q. T. Jiang, A. Frank, R. H. Havemann, V. Parihar, and M. Nowell, in Digest of Technical Papers Symposium on VLSI Technology, 139 (2001).
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