Author:
Vinogradova Ekaterina,Smith Casey E.,Mueller Dennis W.,Reidy Richard F.
Publisher
The Electrochemical Society
Subject
Electrical and Electronic Engineering,Electrochemistry,Physical and Theoretical Chemistry,General Materials Science,General Chemical Engineering
Reference29 articles.
1. International Technology Roadmap for Semiconductors (ITRS), 2007 Interconnect Update.
2. Low dielectric constant films prepared by plasma-enhanced chemical vapor deposition from tetramethylsilane
3. Supercritical CO2 Applications in BEOL Cleaning
4. C. E. Smith, M. Du, P. D. Matz, D. W. Mueller, and R. F. Reidy , in
Advanced Metallization Conference
, S. W. Russell , M. E. Mills , A. Osaki , and T. Yoda , Editors, p. 425, Materials Research Society (2006).
5. High-Resolution-Electron-Microscopy Investigation of Nanosize Inclusions
Cited by
11 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献