Author:
Miller David C.,Gall Ken,Stoldt Conrad R.
Publisher
The Electrochemical Society
Subject
Electrical and Electronic Engineering,Electrochemistry,Physical and Theoretical Chemistry,General Materials Science,General Chemical Engineering
Reference17 articles.
1. J.A. Walker, K.J. Gabriel and M. Mehregany , in
Proceedings of IEEE MEMS
, 56 (1990).
2. Stress-Corrosion Cracking and Blistering of Thin Polycrystalline Silicon Films in Hydrofluoric Acid
3. The mechanical strength of polysilicon films: Part 1. The influence of fabrication governed surface conditions
4. H. Kahn, C. Deeb, I. Chasiotis, and A.H. Heuer , J. MEMS., In press.
5. T.A Lober and R.T. Howe , in
Proceedings of IEEE MEMS
, 59 (1988).
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