Probing microelectromechanical systems in an environmentally controlled chamber using long working distance interferometry
Author:
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4816017
Reference32 articles.
1. Vapor Lubricant Transport in MEMS Devices
2. Macro- to Nanoscale Wear Prevention via Molecular Adsorption
3. Effects of adsorbed water layer structure on adhesion force of silicon oxide nanoasperity contact in humid ambient
4. Effect of nanoscale heating on electrical transport in RF MEMS switch contacts
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