In situoxygen plasma cleaning of microswitch surfaces—comparison of Ti and graphite electrodes-Reference-Cited by-同舟云学术

登录注册会员服务联系我们

In situoxygen plasma cleaning of microswitch surfaces—comparison of Ti and graphite electrodes

Published:2016-10-18 Issue:11 Volume:26 Page:115020
ISSN:0960-1317
Container-title:Journal of Micromechanics and Microengineering
language:
Short-container-title:J. Micromech. Microeng.

Author:

Oh Changho,Streller Frank,Ashurst W Robert,Carpick Robert W,de Boer Maarten P

Funder

National Science Foundation

Publisher

IOP Publishing

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials

Link

http://stacks.iop.org/0960-1317/26/i=11/a=115020/pdf

Reference47 articles.

1. Plasma cleaning and the removal of carbon from metal surfaces

2. Low-pressure plasma cleaning: a process for precision cleaning applications

3. Plasma cleaning of metals: Lubricant oil removal

4. Developments of Plasma Etching Technology for Fabricating Semiconductor Devices

5. Vapor deposition of amino-functionalized self-assembled monolayers on MEMS

Cited by 14 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Stearate and hindered amine light stabilizers coordinate to boost charge storage performance of water electret melt-blown nonwovens;Separation and Purification Technology;2024-03

2. Low voltage cold and hot switching in nanoswitches cleaned by in situ oxygen plasma can achieve low stable contact resistance;Journal of Applied Physics;2024-01-08

3. The Characteristics of Green-synthesized Magnesium Oxide Nanoparticles (MgONPs) and their Biomedical Applications;Mini-Reviews in Medicinal Chemistry;2023-05

4. Plasma Surface Engineering of Natural and Sustainable Polymeric Derivatives and Their Potential Applications;Polymers;2023-01-12

5. Approaches to synthesize MgO nanostructures for diverse applications;Heliyon;2020-09

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370

www.globalauthorid.com

TOP

Copyright © 2019-2024 北京同舟云网络信息技术有限公司
京公网安备11010802033243号京ICP备18003416号-3