Porous Silicon Formation by Galvanic Etching
Author:
Publisher
Springer International Publishing
Link
http://link.springer.com/content/pdf/10.1007/978-3-319-04508-5_3-2
Reference82 articles.
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3. Archer RJ (1960) Stain films on silicon. J Phys Chem Solid 14:104–110
4. Ashruf CMA, French PJ, Bressers PMMC, Sarro PM, Kelly JJ (1998) A new contactless electrochemical etch-stop based on a gold/silicon/TMAH galvanic cell. Sens Actuators A 66:284–291
5. Ashruf CMA, French PJ, Bressers PMMC, Kelly JJ (1999) Galvanic porous silicon formation without external contacts. Sens Actuators A 74:118–122
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