Leakage Current and Breakthrough Measurements on Moisturized SiCOH
Author:
Publisher
The Electrochemical Society
Subject
Electronic, Optical and Magnetic Materials
Reference18 articles.
1. Low Dielectric Constant Materials
2. Low-k dielectric materials
3. Low dielectric constant materials for microelectronics
4. Investigation of Moisture Uptake in Low-$\kappa$ Dielectric Materials
5. Fourier Transform Infrared Spectroscopy of Moisturized Low-$\kappa$ Dielectric Materials
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1. Effect of accelerated hydrothermal aging on the durability of Si-based dielectric thin films;Microelectronic Engineering;2022-08
2. Moisture Diffusion in Dense SiO2 and Ultra Low k Integrated Stacks;2019 IEEE International Integrated Reliability Workshop (IIRW);2019-10
3. Leakage current induced by surfactant residues in self-assembly based ultralow-k dielectric materials;Applied Physics Letters;2017-07-17
4. Band diagram for low-k/Cu interconnects: The starting point for understanding back-end-of-line (BEOL) electrical reliability;Microelectronics Reliability;2016-08
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