Flash-Enhanced Atomic Layer Deposition: Basics, Opportunities, Review, and Principal Studies on the Flash-Enhanced Growth of Thin Films-Reference-Cited by-同舟云学术

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Flash-Enhanced Atomic Layer Deposition: Basics, Opportunities, Review, and Principal Studies on the Flash-Enhanced Growth of Thin Films

Published:2015 Issue:7 Volume:4 Page:P277-P287
ISSN:2162-8769
Container-title:ECS Journal of Solid State Science and Technology
language:en
Short-container-title:ECS J. Solid State Sci. Technol.

Author:

Henke Thomas,Knaut Martin,Hossbach Christoph,Geidel Marion,Rebohle Lars,Albert Matthias,Skorupa Wolfgang,Bartha Johann W.

Publisher

The Electrochemical Society

Subject

Electronic, Optical and Magnetic Materials

Reference62 articles.

1. Atomic layer deposition (ALD): from precursors to thin film structures

2. Atomic Layer Deposition Chemistry: Recent Developments and Future Challenges

3. Surface chemistry of atomic layer deposition: A case study for the trimethylaluminum/water process

4. Atomic Layer Deposition: An Overview

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4. Ultraviolet photo-enhanced atomic layer deposition for improving dielectric properties of low temperature deposited Al₂O₃;Journal of Vacuum Science & Technology A;2022-07

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