Recent Developments in the Interpretation of Spreading Resistance Profiles for VLSI‐Technology-Reference-Cited by-同舟云学术

登录注册会员服务联系我们

Recent Developments in the Interpretation of Spreading Resistance Profiles for VLSI‐Technology

Published:1990-02-01 Issue:2 Volume:137 Page:679-683
ISSN:0013-4651
Container-title:Journal of The Electrochemical Society
language:
Short-container-title:J. Electrochem. Soc.

Author:

Vandervorst W.¹,Clarysse T.¹

Affiliation:

1. IMEC vzw, Kapeldreef 75, B‐3030 Leuven, Belgium

Publisher

The Electrochemical Society

Subject

Materials Chemistry,Electrochemistry,Surfaces, Coatings and Films,Condensed Matter Physics,Renewable Energy, Sustainability and the Environment,Electronic, Optical and Magnetic Materials

Link

https://iopscience.iop.org/article/10.1149/1.2086531/pdf

Cited by 42 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Etching Processes in Semiconductor Manufacturing;Materials Science and Technology;2013-02-15

2. Characterization of electrically active dopant profiles with the spreading resistance probe;Materials Science and Engineering: R: Reports;2004-12-31

3. Retarded Diffusion of Phosphorus in Silicon-on-Insulator Structures;Japanese Journal of Applied Physics;2000-02-15

4. Formation of deep p-n junctions in p-type Czochralski grown silicon by hydrogen plasma treatment;Applied Physics A: Materials Science & Processing;1998-04-01

5. Quantification of nanospreading resistance profiling data;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1998-01

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370

www.globalauthorid.com

TOP