Author:
Sah R. E.,Baumann H.,Driad R.,Wagner J.
Publisher
The Electrochemical Society
Subject
Materials Chemistry,Electrochemistry,Surfaces, Coatings and Films,Condensed Matter Physics,Renewable Energy, Sustainability and the Environment,Electronic, Optical and Magnetic Materials
Reference53 articles.
1. S. Sze ,VLSI Technology, p. 261, McGraw-Hill, New York (1988).
2. R. Williams ,Modern GaAs Processing Methods, p. 153, Artech House, Norwood, MA (1990).
3. Silicon nitride and oxynitride films
4. Effects of Si3N4, SiO, and polyimide surface passivations on GaAs MESFET amplifier RF stability
5. Passivation of GaAs FET's with PECVD silicon nitride films of different stress states
Cited by
3 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献