Thermochemical Properties of Halides and Halohydrides of Silicon and Carbon
Author:
Publisher
The Electrochemical Society
Subject
Electronic, Optical and Magnetic Materials
Reference62 articles.
1. A Survey of Wide Bandgap Power Semiconductor Devices
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3. Trade-Off between Parasitic Deposition and SiC Homoepitaxial Growth Rate Using Halogenated Si-Precursors
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5. Brominated Chemistry for Chemical Vapor Deposition of Electronic Grade SiC
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