Brominated Chemistry for Chemical Vapor Deposition of Electronic Grade SiC
Author:
Affiliation:
1. Department of Physics, Chemistry and Biology, Linköping University, SE-581 83 Linköping, Sweden
Funder
Swedish Foundation for Strategic Research
Vetenskapsrådet
Energimyndigheten
Publisher
American Chemical Society (ACS)
Subject
Materials Chemistry,General Chemical Engineering,General Chemistry
Link
https://pubs.acs.org/doi/pdf/10.1021/acs.chemmater.5b00074
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5. 4H SiC Epitaxial Growth with Chlorine Addition
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