Organosilicate Spin-on Glasses-Reference-Cited by-同舟云学术

Organosilicate Spin-on Glasses

Published:2004 Issue:3 Volume:151 Page:F37
ISSN:0013-4651
Container-title:Journal of The Electrochemical Society
language:en
Short-container-title:J. Electrochem. Soc.

Author:

Kim Suhan,Toivola Yvete,Cook Robert F.,Char Kookheon,Chu Sang-Hyun,Lee Jin-Kyu,Yoon Do Y.,Rhee Hee-Woo

Publisher

The Electrochemical Society

Subject

Materials Chemistry,Electrochemistry,Surfaces, Coatings and Films,Condensed Matter Physics,Renewable Energy, Sustainability and the Environment,Electronic, Optical and Magnetic Materials

Reference23 articles.

1. The International Technology Roadmap for Semiconductors, Semiconductor Industry Association, San Jose, CA (2002).

2. Templating Nanoporosity in Thin-Film Dielectric Insulators

3. Development of a Low-Dielectric-Constant Polymer for the Fabrication of Integrated Circuit Interconnect

4. Experimental and Theoretical Study of Structure-Dielectric Property Relationships for Polysilsesquioxanes

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