Affiliation:
1. Bell Laboratories, Murray Hill, New Jersey 07974
Publisher
The Electrochemical Society
Subject
Materials Chemistry,Electrochemistry,Surfaces, Coatings and Films,Condensed Matter Physics,Renewable Energy, Sustainability and the Environment,Electronic, Optical and Magnetic Materials
Cited by
102 articles.
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2. Controlled Release of Microcantilever from a Silicon-on-Insulator Wafer with Oxide Brace;2021 International Conference on Radar, Antenna, Microwave, Electronics, and Telecommunications (ICRAMET);2021-11-23
3. Modeling the topography of uneven substrates post spin-coating;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2018-05
4. Deposition and Properties of Insulating;Microelectronic Materials;2017-10-05
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