Author:
Nishiguchi Tetsuya,Morikawa Yoshiki,Kekura Mitsuru,Miyamoto Masaharu,Nonaka Hidehiko,Ichimura Shingo
Publisher
The Electrochemical Society
Subject
Materials Chemistry,Electrochemistry,Surfaces, Coatings and Films,Condensed Matter Physics,Renewable Energy, Sustainability and the Environment,Electronic, Optical and Magnetic Materials
Reference28 articles.
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3. Comparison of initial oxidation of Si(111)7×7 with ozone and oxygen investigated by second harmonic generation
4. Stimulated etching of Si(100) by Cl2 molecular beams with hyperthermal translational energies
5. Relative rate constants of O(1D2)—olefin reactions
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1. Silicon oxidation by ozone;Journal of Physics: Condensed Matter;2009-03-11