Author:
Heo Sungho,Baek Sungkweon,Lee Dongkyu,Hasan Musarrat,Jung Hyungsuk,Lee Jongho,Hwang Hyunsang
Publisher
The Electrochemical Society
Subject
Electrical and Electronic Engineering,Electrochemistry,Physical and Theoretical Chemistry,General Materials Science,General Chemical Engineering
Reference12 articles.
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Proceedings of 2003 Symposium on VLSI Technology
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2. Self-Aligned n-Channel Germanium MOSFETs With a Thin Ge Oxynitride Gate Dielectric and Tungsten Gate
3. Activation and diffusion studies of ion-implanted p and n dopants in germanium
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