Spin‐on Glass Curing by Rapid Thermal Annealing-Reference-Cited by-同舟云学术

登录注册会员服务联系我们

Spin‐on Glass Curing by Rapid Thermal Annealing

Published:1990-12-01 Issue:12 Volume:137 Page:3923-3925
ISSN:0013-4651
Container-title:Journal of The Electrochemical Society
language:
Short-container-title:J. Electrochem. Soc.

Author:

Uoochi Yasuo¹,Tabuchi Akira¹,Furumura Yuji¹

Affiliation:

1. Fujitsu Limited, Process Development Division, 1015 Kamikodanaka, Nakahara‐ku, Kawasaki 211, Japan

Publisher

The Electrochemical Society

Subject

Materials Chemistry,Electrochemistry,Surfaces, Coatings and Films,Condensed Matter Physics,Renewable Energy, Sustainability and the Environment,Electronic, Optical and Magnetic Materials

Link

https://iopscience.iop.org/article/10.1149/1.2086328/pdf

Cited by 12 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Interlevel Dielectrics;Handbook of Semiconductor Interconnection Technology, Second Edition;2006-02-22

2. Finite-element calculations of mechanical stresses induced by water adsorption/desorption in silicate glasses;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1999

3. Rapid thermal annealing of spin-coated phosphoric acid films for shallow junction formation;Applied Physics Letters;1997-07-21

4. Rapid thermal annealing of thin doped and undoped spin-on glass films;Materials Science and Engineering: B;1995-05

5. Rapid Isothermal Annealing of Doped and Undoped Spin-on Glass Films;MRS Proceedings;1995

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370

www.globalauthorid.com

TOP