Finite-element calculations of mechanical stresses induced by water adsorption/desorption in silicate glasses-Reference-Cited by-同舟云学术

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Finite-element calculations of mechanical stresses induced by water adsorption/desorption in silicate glasses

Published:1999 Issue:6 Volume:17 Page:2603
ISSN:0734-211X
Container-title:Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
language:en
Short-container-title:J. Vac. Sci. Technol. B

Author:

Hoffmann Thomas,LeDuc Philippe,Senez Vincent

Publisher

American Vacuum Society

Subject

General Engineering

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