Application of Preshaping Control to a Semiconductor Wafer Transfer Robot and Experimental Verification
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Publisher
The Society of Instrument and Control Engineers
Link
https://www.jstage.jst.go.jp/article/sicetr/50/4/50_328/_pdf
Reference10 articles.
1. 2) S. Futami, N. Kyura and S. Hara: Vibration Absorption Control of Industrial Robots by Acceleration Feedback, IEEE Transactions on Industrial Electronics, IE-30-3, 299/305 (1983)
2. 3) Y. Marushita, H. Ikeda and H. Sugie: Vibration Suppression Control using the Load-side Acceleration Feedback, Annu. Conf. IEEE Ind. Electron. Soc., 33-2, 810/815 (2007)
3. 5) N.C. Singer and W.P. Seering: Preshaping Command Inputs to Reduce System Vibration, Transactions of the ASME Journal of Dynamic Systems, Measurement and Control, 112-1, 76/82 (1990)
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