Author:
Shahsenov Izat S.,Miakonkikh Andrey V.,Rudenko Kostantin V.
Reference9 articles.
1. Probing doping conformality in fin shaped FET structures;Vandervorst,2008
2. Plasma Molding Over Surface Topography: Simulation of Ion Flow, and Energy and Angular Distributions Over Steps in RF High-Density Plasmas;Kim,2002
3. Two dimensional computer simulation of plasma immersion ion implantation
4. Simulation of trench homogeneity in plasma immersion ion implantation
5. Conformal Doping of FINFETs: a Fabrication and Metrology Challenge;Vandervorst,2008
Cited by
2 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献