<title>High-performance MEMS microgyroscope

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High-performance MEMS microgyroscope

Published:2002-04-19 Issue: Volume: Page:
ISSN:0277-786X
Container-title:Design, Test, Integration, and Packaging of MEMS/MOEMS 2002
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Author:

Bae Sam Y.,Hayworth Ken J.,Yee Karl Y.,Shcheglov Kirill,Wiberg Dean V.

Publisher

SPIE

Cited by 12 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Noise analysis of mode matched vibratory gyroscopes;Microsystem Technologies;2022-09-12

2. Inertial Navigation Systems for UAV: Uncertainty and Error Measurements;2019 IEEE 5th International Workshop on Metrology for AeroSpace (MetroAeroSpace);2019-06

3. Pre-buried mask wet etching for suspended silicon microstructures applied in rocking mass micro-gyroscope;Microsystem Technologies;2017-06-15

4. The on-chip temperature compensation and temperature control research for the silicon micro-gyroscope;Microsystem Technologies;2014-07-25

5. Simulation Analysis of a Symmetrical Micromachined Vibratory Rate Gyroscope;2012 Second International Conference on Instrumentation, Measurement, Computer, Communication and Control;2012-12

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