Author:
Yang Bo,Dai Bo,Liu Xiaojun,Xu Lu,Deng Yunpeng,Wang Xingjun
Publisher
Springer Science and Business Media LLC
Subject
Electrical and Electronic Engineering,Hardware and Architecture,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Reference13 articles.
1. Acar C, Shkel AM (2005) An approach for increasing drive-mode bandwidth of MEMS vibratory gyroscopes. J Microelectromech Syst 14(3):520–528
2. Bae SY, Hayworth KJ, Yee KY (2002) High performance MEMS micro-gyroscope. In: Proceedings of SPIE, Design, Test, Integration, and Packaging of MEMS/MOEMS, pp 316–324
3. Ferguson MI, Keymeulen D, Peay C, et al (2005) Effect of temperature on MEMS vibratory rate gyroscope. In: Proceedings of the 2005 IEEE Aerospace Conference, pp 1–6
4. Hopcroft1 MA, Agarwal M, Park KK (2006) Temperature compensation of a MEMS resonator using quality factor as a thermometer. MEMS 2006, Istanbul, Turkey, pp 222–225
5. Jeon SH, Lee JY, Jung HK (2005) Two-mass system with wide bandwidth for SiOG (Silicon on Glass) vibratory gyroscopes. In: The 13th International Conference on Solid-State Sensors, Actuators and Microsystem. Seoul, Korea, pp 539–542
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