Abstract
External temperature changes can detrimentally affect the properties of a microaccelerometer, especially for high-precision accelerometers. Temperature control is the fundamental method to reduce the thermal effect on microaccelerometer chips, although high-performance control has remained elusive using the conventional proportional-integral-derivative (PID) control method. This paper proposes a modified approach based on a genetic algorithm and fuzzy PID, which yields a profound improvement compared with the typical PID method. A sandwiched microaccelerometer chip with a measurement resistor and a heating resistor on the substrate serves as the hardware object, and the transfer function is identified by a self-built measurement system. The initial parameters of the modified PID are obtained through the genetic algorithm, whereas a fuzzy strategy is implemented to enable real-time adjustment. According to the simulation results, the proposed temperature control method has the advantages of a fast response, short settling time, small overshoot, small steady-state error, and strong robustness. It outperforms the normal PID method and previously reported counterparts. This design method as well as the approach can be of practical use and applied to chip-level package structures.
Funder
National Natural Science Foundation of China
Science Challenge Project
Ningbo Natural Science Foundation
Fundamental Research Funds for the Central Universities
Natural Science Basic Research Program of Shaanxi
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Control and Systems Engineering
Cited by
6 articles.
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