Design of MEMS gyroscope interface ASIC with on-chip temperature compensation
Author:
Publisher
Elsevier BV
Subject
Applied Mathematics,Electrical and Electronic Engineering,Condensed Matter Physics,Instrumentation
Reference26 articles.
1. Design, Fabrication and Experiment of Double U-Beam MEMS Vibration Ring Gyroscope;Cao;Micromachines-Basel,2019
2. Closed loop driving and detect circuit of piezoelectric solid-state micro gyroscope;He;Microsyst. Technol.,2014
3. Bias Thermal Stability Improvement of Mode-Matching MEMS Gyroscope Using Mode Deflection;Wang;J. Microelectromech. S,2023
4. A Sub-0.1°/h Bias-Instability Split-Mode MEMS Gyroscope With CMOS Readout Circuit;Zhao;IEEE J. Solid-St Circ.,2018
5. Pole-Zero Temperature Compensation Circuit Design and Experiment for Dual-Mass MEMS Gyroscope Bandwidth Expansion;Cao;IEEE/ASME Trans. Mechatron.,2019
Cited by 3 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Compensation of temperature effects in force-balanced microelectromechanical system accelerometers;Measurement;2024-09
2. Monolithic Integrated Interface ASIC With Quadrature Error Correction for MEMS Dual-Mass Vibration Gyroscope;IEEE Sensors Journal;2024-06-01
3. Temperature drift suppression for micro‐electro‐mechanical system gyroscope based on vibrational‐displacement control with harmonic amplitude ratio;Micro & Nano Letters;2024-01
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