DSA materials contributions to the defectivity performance of 14nm half-pitch LiNe flow at IMEC-Reference-Cited by-同舟云学术

DSA materials contributions to the defectivity performance of 14nm half-pitch LiNe flow at IMEC

Published:2016-03-22 Issue: Volume: Page:
ISSN:0277-786X
Container-title:SPIE Proceedings
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Author:

Pathangi Hari,Vaid Varun,Chan Boon Teik,Vandenbroeck Nadia,Li Jin,Hong Sung Eun,Cao Yi,Durairaj Baskaran,Lin Guanyang,Somervell Mark,Kitano Takahiro,Harukawa Ryota,Sah Kaushik,Cross Andrew,Bayana Hareen,D’Urzo Lucia,Gronheid Roel

Publisher

SPIE

Reference5 articles.

1. Self-assembling materials for lithographic patterning: overview, status, and moving forward,;Hinsberg,2010

2. Defect source analysis of directed self-assembly process (DSA of DSA);Rincon,2013

3. Impact of BCP Asymmetry on DSA Patterning Performance;Williamson,2015

4. Defect mitigation and root cause studies in 14 nm half-pitch chemo-epitaxy directed self-assembly LiNe flow

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