Machine learning for mask/wafer hotspot detection and mask synthesis-Reference-Cited by-同舟云学术

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Machine learning for mask/wafer hotspot detection and mask synthesis

Published:2017-10-16 Issue: Volume: Page:
ISSN:
Container-title:Photomask Technology
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Author:

Pan David Z.,Lin Yibo,Xu Xiaoqing,Ou Jiaojiao

Publisher

SPIE

Reference53 articles.

1. Alpaydin, E., [Introduction to machine learning], MIT press (2014).

2. Handbook of pattern recognition and computer vision;Chen;World Scientific,2015

3. Witten, I.H., Frank, E., Hall, M.A., and Pal, C.J., [Data Mining: Practical machine learning tools and techniques], Morgan Kaufmann (2016).

4. “Google DeepMind.” https://deepmind.com/.

5. Deep learning

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