Affiliation:
1. Lithoguru.com, 1605 Watchhill Road, Austin, Texas 78703, United States
Publisher
SPIE-Intl Soc Optical Eng
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Cited by
2 articles.
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1. Metrology;2021 IEEE International Roadmap for Devices and Systems Outbriefs;2021-11
2. Etch considerations for directed self-assembly patterning using capacitively coupled plasma;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;2018-05